Micromachining Technology: Safety Concepts and Applications

This lecture covers the micromachining technology used in advanced weapon systems, focusing on the safety concept involving positionable mirrors and target electronics. It delves into the fabrication of mirrors, control engines, and anti-reverse mechanisms, along with the application of dual-mirror-redirect safety concepts. The presentation also discusses the history and vision of Sandia National Laboratories in developing MEMS technology. Various technologies like 2-layer, 3-layer, and 4-layer structures are explained, emphasizing stress control in PolySi layers. The lecture concludes with a detailed explanation of the fabrication process, including post-annealing techniques and the use of sacrificial layers for stress control.