MEMS Products: Accelerometer

In course

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Description

This lecture covers the successful MEMS products that are part of our daily life, such as accelerometers, fingerprint sensors, 6-axis IMUs, microphones, pressure sensors, and magnetometers. It delves into the fabrication process of accelerometers, focusing on capacitive comb-drive accelerometers and the MEMS layer made of silicon. The application of accelerometers in car airbags is also discussed, highlighting the key players in the industry and their use in smartphones for screen rotation and gaming.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_9l2b27tz

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