Bulk Acoustic Wave Resonators in MEMS

This lecture covers the design and fabrication of Bulk Acoustic Wave (BAW) resonators, focusing on their application in smartphones for RF front-end modules. It explains the structure of BAW resonators, the fabrication process, and the importance of precise thickness and good piezoelectric properties. The lecture also discusses the two types of BAW resonators, FBAR and SMR, and their role in telecom band selection. Key players in the industry and the widespread use of BAW filters in smartphones, such as the iPhone 6S, are highlighted.