Transparent Conductive Oxide: Sputtering

This lecture covers the principles of sputtering for transparent conductive oxide (TCO) in photovoltaic solar cells, including plasma spalla preso, Paschen law, antireflection coating, and IR light management. It discusses film growth, control parameters, and examples of sputtering methods. The lecture also explores the fabrication process, results, and efficiency improvements of TCO using ZnO:Al-SiO2. Additionally, it delves into the use of piezoelectric materials like AIN, ZnO, and PZT for ultrasound transducers, mass sensors, and bulk acoustic wave filters, as well as the sputtering setup details for various materials and deposition conditions.