Thermal Sensors: Pressure Measurement

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Description

This lecture covers the use of thermal sensors for pressure measurement, explaining how changes in pressure affect thermal conductivity and the construction of MEMS sensors. It also discusses the limitations of pressure measurement at different pressure levels, the need for sensor calibration, and the use of ionization gauges in ultra-high vacuum systems.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_fs7q8n5n

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Ontological neighbourhood

Chemistry

Analytical chemistry: Mass spectrometry

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