Lecture

Micro/Nanomechanical Devices: Scaling Laws and MEMS Applications

Description

This lecture introduces the scaling laws in micro/nanomechanical devices, emphasizing the modification of forces' importance at smaller scales. It covers various MEMS products like accelerometers, gyroscopes, sensors, and actuators, showcasing their widespread applications in consumer electronics, healthcare, and aerospace industries.

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_mxc4jk2l

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