MEMS Packaging: Hermeticity, Getters, and Vacuum Requirements

This lecture covers the importance of hermetic capping in MEMS packaging to protect sensor structures and ensure mechanical stability. It discusses gas sources, vacuum requirements, the role of getters, and different getter families. The lecture also explains the activation of getters, provides examples, and compares vacuum packaging methods. It delves into leak rate measurement methods, hermeticity characterization techniques, and typical processes for hermetic packaging. Additionally, it explores the testing of MEMS hermeticity using membrane deflection, resonator, and IR spectroscopy methods, along with the challenges posed by vacuum encapsulation. The lecture concludes with insights into the acceleration and gyroscope hermetic packaging processes, emphasizing the importance of electrical feedthroughs and lateral surface feedthroughs in device connections.

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Gyroscope

A gyroscope (from Ancient Greek γῦρος gŷros, "round" and σκοπέω skopéō, "to look") is a device used for measuring or maintaining orientation and angular velocity. It is a spinning wheel or disc in which the axis of rotation (spin axis) is free to assume any orientation by itself. When rotating, the orientation of this axis is unaffected by tilting or rotation of the mounting, according to the conservation of angular momentum.

Accelerometer

An accelerometer is a tool that measures proper acceleration. Proper acceleration is the acceleration (the rate of change of velocity) of a body in its own instantaneous rest frame; this is different from coordinate acceleration, which is acceleration in a fixed coordinate system. For example, an accelerometer at rest on the surface of the Earth will measure an acceleration due to Earth's gravity, straight upwards (by definition) of g ≈ 9.81 m/s2. By contrast, accelerometers in free fall (falling toward the center of the Earth at a rate of about 9.

Vibrating structure gyroscope

A vibrating structure gyroscope, defined by the IEEE as a Coriolis vibratory gyroscope (CVG), is a gyroscope that uses a vibrating structure to determine the rate of rotation. A vibrating structure gyroscope functions much like the halteres of flies (insects in the order Diptera). The underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even if its support rotates. The Coriolis effect causes the object to exert a force on its support, and by measuring this force the rate of rotation can be determined.

Ring laser gyroscope

A ring laser gyroscope (RLG) consists of a ring laser having two independent counter-propagating resonant modes over the same path; the difference in phase is used to detect rotation. It operates on the principle of the Sagnac effect which shifts the nulls of the internal standing wave pattern in response to angular rotation. Interference between the counter-propagating beams, observed externally, results in motion of the standing wave pattern, and thus indicates rotation.

Fibre-optic gyroscope

A fibre-optic gyroscope (FOG) senses changes in orientation using the Sagnac effect, thus performing the function of a mechanical gyroscope. However its principle of operation is instead based on the interference of light which has passed through a coil of optical fibre, which can be as long as . Two beams from a laser are injected into the same fibre but in opposite directions. Due to the Sagnac effect, the beam travelling against the rotation experiences a slightly shorter path delay than the other beam.