Electro-Thermo-Mechanical Analysis: Scaling Laws & Simulations

This lecture covers the analysis of electro-thermo-mechanical systems in micro and nanosystems, focusing on topics such as thermal bimorphs, coefficient of thermal expansion, temperature-dependent material properties, and device profile analyses. The instructor explains the multiphysics simulations, electro-thermo-mechanical coupling, and the effects of temperature on material properties. Various actuators like hot-arm, cold-arm, and V-type/chevron actuators are discussed, along with the simulation of deflection in cantilevers with different materials. The lecture also delves into thermomechanical actuators, coupled field problems, and one-way vs. two-way coupling in simulations, emphasizing the interplay between electrical, thermal, and structural aspects in microactuators.