MEMS Resonators: Types and Applications

This lecture covers the fundamentals of MEMS resonators, including types such as flexural and torsional resonators, and their applications in filters and oscillators. It discusses the importance of quality factor, trade-offs in resonator design, and transduction methods. The lecture also explores the significance of MEMS resonators in communication front-ends, timekeeping devices, and frequency sources. Additionally, it delves into key performance metrics like phase noise and temperature stability, along with the challenges and solutions in achieving precise frequency control. The presentation concludes with insights on resonator modeling, coupled resonators, and filter design considerations.