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Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...
Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
Micro-solid oxide fuel cell (mu SOFC) structures with annular Pt electrodes have been fabricated by means of silicon micromachining. The annular cathodes contained a defined triple phase boundary (TPB) length, which allowed the derivation of the ionic curr ...