Person

Nachiappan Chidambaram

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Related publications (8)

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Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Paul Muralt, Ramin Matloub Aghdam, Robin Nigon, Silviu Cosmin Sandu, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...
Institute of Physics2015

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...
Institute of Electrical and Electronics Engineers2015

Advanced sol-gel processing of PZT thin films for piezoelectric MEMS structures

Nachiappan Chidambaram

Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer products by replacing bulky devices by miniaturized versions that are suitable for portable applications as for instance in mobile phones. Besides small size, the ...
EPFL2014
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