Multiwavelength High Resolution Interference Microscopy (HRIM) for the characterization of small size microlenes
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Introduction Definitions of microlens and Challenges for small size 2. High Resolution Interference Microscope (HRIM) System and Upgraded features 5 frame phase shift algorithm 3. Principle of characterization of microlenses Standard tests Unconventional tests 4. Experiments Test results and discussions 5. Conclusion
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