Microscope

Summary

A microscope () is a laboratory instrument used to examine objects that are too small to be seen by the naked eye. Microscopy is the science of investigating small objects and structures using a microscope. Microscopic means being invisible to the eye unless aided by a microscope. There are many types of microscopes, and they may be grouped in different ways. One way is to describe the method an instrument uses to interact with a sample and produce images, either by sending a beam of light or electrons through a sample in its optical path, by detecting photon emissions from a sample, or by scanning across and a short distance from the surface of a sample using a probe. The most common microscope (and the first to be invented) is the optical microscope, which uses lenses to refract visible light that passed through a thinly sectioned sample to produce an observable image. Other major types of microscopes are the fluorescence microscope, electron microscope (both the transmission elec

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Micro-Four-Point probe based on SU-8 cantilevers

Stephan Keller

The four-point probe is used for the measurement of the resistivity of thin metal or semiconductor films. There is an interest in miniaturization of the probes to obtain higher surface sensitivity, an increased spatial resolution and less damage to the sample. In this project the design, fabrication and first characterisation of a microscopic four-point device using SU-8-cantilevers were realized. A 200-µm-thick SU-8 body chip allows the handling of the device and the electrical connection to the measurement set-up. A SU-8 cantilever with 10 µm thickness is split into four equally spaced micro-cantilevers at its freestanding extremity, each of them supporting a probe tip. This design and the high flexibility of SU-8 ensure a stable electrical point-contact between samples and probe tips. The microscopic four-point probe is fabricated by surface micromachining using silicon as substrate and polysilicon as sacrificial layer. The mould for the probe tips is etched by KOH. 50 nm-Pt, 20 nm-Ti and 300 nm-Al are deposited by sputtering. The metal layer is structured using a chlorine-based plasma dry etch. Two steps of SU-8 photolithography result in the structure of the thin cantilevers and the thick body chip. The entire device is finally released by dry etch of the sacrificial layer with SF6. The smallest probe spacing achieved is 10 µm. The fabricated micro-four-point probes were used to measure the sheet resistance of a 140–nm-thick evaporated gold film. A first series of four-point measurements with a fabricated microscopic SU-8-device having a probe-to-probe spacing of 20 µm resulted in a mean value of sheet resistance Rs(µ4pp)=1.57E-6 Ω/square. This value is comparable to the one of Rs(omnimap)=1.52E-6 Ω/square measured with the commercialised Omnimap RS75 resistivity meter from KLA Tencor.

2005

This work aims at completing the development of local mechanical spectroscopy as initiated by F. Oulevey during his thesis. More precisely, the measurement of the amplitude and phase lag of the strain as a function of the applied stress frequency bas to be settled. Parallel to the development of the technical aspects making such an acquisition possible, the model used to analyze the measured quantities is modified in order to describe the studied system more realistically. The local mechanical spectrometer is based on an Atomic Force Microscope (AFM) using an optical method to detect the deflection of the lever. The stress is applied locally on the sample by a transducer fixed at the base of the cantilever. The bandwidth of the microscope' s electronics does not allow one to detect the cantilever movement at frequencies higher than the MHz. Two different approaches are followed to overcome this limit. The first approach exploits the nonlinearity of the contact to down-convert, via mechanical mixing, the high-frequency signals into low-frequency ones. This work demonstrates the feasibility of this technique, as well as its limits, mainly due to the difficulty to analyze confidently the obtained results. The second approach takes advantage of the stroboscopic detection of the movement of the cantilever. The intensity of the laser used to detect the deflection of the cantilever is modulated at a frequency close to the applied stress frequency. The amplitude of the signal recorded at the difference frequency corresponds then to the high-frequency amplitude of the cantilever movement. The frequency range attainable with this method is only limited by the bandwidth of the transducer providing the excitation. The model connecting the measured quantities (strain amplitude and phase lag) to the desired mechanical properties (elasticity and damping) consists in a beam clamped at one end, with a tip attached at some point along its length. The tip itself is connected to the sample via a spring and a dashpot in parallel, representing the normal interaction, and a spring and a dashpot in parallel representing the interaction in the plane of the sample. Combined with the stroboscopic detection, this model enables one to quantitatively determine the elastic modulus of stiff samples. Many results obtained on a wide range of samples exhibiting very diverse mechanical properties are presented. They demonstrate the validity of the stroboscopic approach, which combines simplicity of use and efficiency.

EPFL2000

Etude par STM de la déposition d'agrégats d'or sur TiO2 et mesure de l'émission électronique secondaire induite par l'impact d'agrégats sur une surface

Pierre Convers

This thesis work focuses on impact and diffusion processes as well as equilibrium positions of a metal deposited on a surface. The metal is deposited in the form of clusters containing n atoms in a controlled way. Gold or silver clusters cations (Au+n and Ag+n ) are used. Their size (n ∈ [1, 9]), charge state and deposition energy (E = 10 - 4500 eV) are well defined. The surface being at room temperature during the deposition, can be annealed and transferred in a scanning tunnelling microscope (STM) after deposition. The variable temperature microscope was developed during this thesis. The approach of the tip is carried out by an axial motor, which renders the microscope very stable. The first part of this work treats of the evolution of gold deposited on a TiO2(110) surface. Position and size of gold islands created by cluster or atomic depositions are determined by STM. Compared to atomic deposition at the same energy (10 < E < 100 eV), the cluster deposition produces smaller islands with a large islands density after annealing at 800 K. Regardless the deposition conditions, gold atoms diffuse on the surface already at 300 K. The impact energy is the key parameter to reduce the diffusion by cluster or atomic implantation or defect creation. Upon a high energy deposition, part of the deposited gold is invisible to the STM. The fate of these gold atoms is unclear : they are either buried under the surface or ejected in vacuum at the impact. The control of the islands size should permit the creation of a stable system with an optimum catalytic activity (i. e. CO combustion). Research groups have shown that this activity is strongly influenced by the islands size. It is equal to zero if the diameter is greater than 5 nm. The second part of this work is devoted to the electron emission γ induced by the impact of silver clusters Ag+n on a Pt and HOPG surface. Measurements are made by varying the impact energy (and so the speed v) of size-selected clusters on a defined surface. Impact velocity ranges from 104 to 105 m/s, which is lower than the classical threshold. Nevertheless every cluster size produces an electron emission. A potential emission (γ(v=0) ≠ 0) is observed for the monomer on both surfaces, which is caused by excited ions in a metastable state. The γ(v) curves are increasing, and no mesurable oscillation are observed. This does not confirm earlier work by Meiwes-Broer et al. These authors found oscillations in γ on similar systems relating them to the electronic structure of the clusters and the surface. A model based on heating of the electron gas is developed. This model gives good agreements with the γ(v) curves. The electronic temperature is estimated to 3000-8000 K. Similar behavior on both surfaces (Pt and HOPG) depending of the cluster size is shown. This behavior is probably related to the geometrical structure of the clusters. Finally, a more pronounced molecular effect is observed for the HOPG : the number of electrons emitted by the impact of a Ag+n is up to 7 times higher than the number of electrons emitted by impacts of n independent atoms. This value is smaller than 2 for the Pt surface.

EPFL2005