Publication
This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones, for use in compact atomic devices such as vapour-cell atomic clocks or magnetometers. The technology is based on anodic bonding of silicon and relatively thick glass wafers and fills a gap in cell sizes and technologies available up to now: on one side, microfabrication technologies with typical dimensions
Jean-Philippe Ansermet, Arnaud Magrez, Haiming Yu, Marcin Bialek
Paul Muralt, Ramin Matloub Aghdam
Giovanni Boero, Fabio Donati, Soyoung Oh