Publication
Numerical verification of light confinement in a nano solid immersion lens
Abstract
Numerical simulations using the finite element method (FEM) verify the light confinement effect observed in nano-scale solid immersion lenses (SILs). As observed in experiments, a strong light confinement occurs on the bottom surface of the SILs in simulation. The numerical spot size is comparable to the experimental spot size, and provides some insight into the deviation from the analytical expectation of the spot size reduction.
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