Publication

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

Yves Bellouard, Xi Wang
2010
Journal paper
Abstract

We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.

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Related concepts (23)
Nickel titanium
Nickel titanium, also known as nitinol, is a metal alloy of nickel and titanium, where the two elements are present in roughly equal atomic percentages. Different alloys are named according to the weight percentage of nickel; e.g., nitinol 55 and nitinol 60. Nitinol alloys exhibit two closely related and unique properties: the shape memory effect and superelasticity (also called pseudoelasticity).
Shape-memory alloy
In metallurgy, a shape-memory alloy (SMA) is an alloy that can be deformed when cold but returns to its pre-deformed ("remembered") shape when heated. It is also known in other names such as memory metal, memory alloy, smart metal, smart alloy, and muscle wire. The "memorized geometry" can be modified by fixating the desired geometry and subjecting it to a thermal treatment, for example a wire can be taught to memorize the shape of a coil spring.
Diffusionless transformation
Diffusionless transformations, also referred to as displacive transformations, are solid-state changes in the crystal structure that do not rely on the diffusion of atoms over long distances. Instead, they occur due to coordinated shifts in atomic positions, where atoms move by a distance less than the span between neighboring atoms while maintaining their relative arrangement. An illustrative instance of this is the martensitic transformation observed in steel.
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