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Publication
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Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D material transferring techniques, we transfer a 100 nm thick silicon nitride film on top of a silicon nitride coated chip with predefined trenches and holes to form silicon nitride microchannels and membranes.
Tobias Kippenberg, Rui Ning Wang, Junqiu Liu, Wenle Weng, Yang Liu, Jijun He, Miles Henry Anderson