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The main objective of this work is to develop a reliable numerical model to describe dissipation in Suspended Microchannel Resonators, through determination of the Quality Factor, as a costless and quickly reproducible procedure to determine the effectiveness and performance of these innovative MEMS for bio-sensing. Through comparison of numerical results with theoretical and experimental results available in literature we aimed to contribute to the research and understanding of the physical phenomena occurring in these recently developed devices, putting under question some of the previous results and opening to new possibile interpretations and discussions.
Paul Arthur Adrien Pierre Dreyfus
Marilyne Andersen, Caroline Karmann, Yunjoung Cho