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Publication
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
The goal of this project is to create a reliable process flow for the fabrication of a vacuum encapsulation for a resonator. This process shall be done in few steps and with standard processes from cleanroom. This encapsulation provides a wafer-level packaging for the sensor, which has multiple industrial benefits such as increasing yield and reliability and decreasing cost.