Publication
Strain engineering and strain measurement by spring tethers on suspended epitaxial GaN-on-Si photonic crystal devices
Abstract
Suspended epitaxial gallium nitride (GaN) on silicon (Si) photonic crystal devices suffer from large residual tensile strain, especially for long waveguides, because fine structures tend to crack due to large stress. By introducing spring-like tethers, designed by the combination of a spring network model and finite element method simulations, the stress at critical locations was mitigated and the cracking issue was solved. Meanwhile, the tethered-beam structure was found to be potentially a powerful method for high-precision strain measurement in tensile thin films, and in this case, a strain of 2.27(+/- 0.01)x10-3 was measured in 350 nm epitaxial GaN-on-Si.
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Related concepts (32)
Infinitesimal strain theory
In continuum mechanics, the infinitesimal strain theory is a mathematical approach to the description of the deformation of a solid body in which the displacements of the material particles are assumed to be much smaller (indeed, infinitesimally smaller) than any relevant dimension of the body; so that its geometry and the constitutive properties of the material (such as density and stiffness) at each point of space can be assumed to be unchanged by the deformation.
Stress–strain curve
In engineering and materials science, a stress–strain curve for a material gives the relationship between stress and strain. It is obtained by gradually applying load to a test coupon and measuring the deformation, from which the stress and strain can be determined (see tensile testing). These curves reveal many of the properties of a material, such as the Young's modulus, the yield strength and the ultimate tensile strength. Generally speaking, curves representing the relationship between stress and strain in any form of deformation can be regarded as stress–strain curves.
Strain gauge
A strain gauge (also spelled strain gage) is a device used to measure strain on an object. Invented by Edward E. Simmons and Arthur C. Ruge in 1938, the most common type of strain gauge consists of an insulating flexible backing which supports a metallic foil pattern. The gauge is attached to the object by a suitable adhesive, such as cyanoacrylate. As the object is deformed, the foil is deformed, causing its electrical resistance to change.
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