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Publication
New results on powder blasting techniques applied to the manufacture of piezocomposite structures
Abstract
We present the last results concerning investigation of powder blasting techniques to micromachined complex-patterned piezoelectric composite transducers. This technology consists of a beam of eroding powder particles, etching an in-situ-masked PZT plate. We manufacture honeycomb-patterned structures, which can not be achieved with a standard saw-dicing technique.
Official source
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