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Concept
Dielectric barrier discharge
Summary
Dielectric-barrier discharge (DBD) is the electrical discharge between two electrodes separated by an insulating dielectric barrier. Originally called silent (inaudible) discharge and also known as ozone production discharge or partial discharge, it was first reported by Ernst Werner von Siemens in 1857.
The process normally uses high voltage alternating current, ranging from lower RF to microwave frequencies. However, other methods were developed to extend the frequency range all the way down to the DC. One method was to use a high resistivity layer to cover one of the electrodes. This is known as the resistive barrier discharge. Another technique using a semiconductor layer of gallium arsenide (GaAs) to replace the dielectric layer, enables these devices to be driven by a DC voltage between 580 V and 740 V.
DBD devices can be made in many configurations, typically planar, using parallel plates separated by a dielectric or cylindrical, using coaxial plates with a dielectric tube between them. In a common coaxial configuration, the dielectric is shaped in the same form as common fluorescent tubing. It is filled at atmospheric pressure with either a rare gas or rare gas-halide mix, with the glass walls acting as the dielectric barrier. Due to the atmospheric pressure level, such processes require high energy levels to sustain. Common dielectric materials include glass, quartz, ceramics and polymers. The gap distance between electrodes varies considerably, from less than 0.1 mm in plasma displays, several millimetres in ozone generators and up to several centimetres in CO2 lasers.
Depending on the geometry, DBD can be generated in a volume (VDBD) or on a surface (SDBD). For VDBD the plasma is generated between two electrodes, for example between two parallel plates with a dielectric in between. At SDBD the microdischarges are generated on the surface of a dielectric, which results in a more homogeneous plasma than can be achieved using the VDBD configuration At SDBD the microdischarges are limited to the surface, therefore their density is higher compared to the VDBD.
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