Microelectromechanical systems

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Herbert Shea

Christoph Hollenstein

Cristina Martin Olmos

Davide Sacchetto

Mihai Adrian Ionescu

Adrian M. Ionescu is Full Professor at the Swiss Federal Institute of Technology, Lausanne, Switzerland. He received the B.S./M.S. and Ph.D. degrees from the Polytechnic Institute of Bucharest, Romania and the National Polytechnic Institute of Grenoble, France, in 1989 and 1997, respectively. He has held staff and/or visiting positions at LETI-CEA, Grenoble, France and INP Grenoble, France and Stanford University, USA, in 1998 and 1999. Dr. Ionescu has published more than 600 articles in international journals and conferences. He received many Best Paper Awards in international conferences, the Annual Award of the Technical Section of the Romanian Academy of Sciences in 1994 and the Blondel Medal in 2009 for contributions to the progress in engineering sciences in the domain of electronics. He is the 2013 recipient of the IBM Faculty Award in Engineering. He served the IEDM and VLSI conference technical committees and was the Technical Program Committee (Co)Chair of ESSDERC in 2006 and 2013. He is a member of the SATW. He is director of the Laboratory of Micro/Nanoelectronic Devices (NANOLAB).

Alan Howling

Ivo Furno

Paul Muralt

Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award. Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/)

Arnaud Bertsch

Paolo Ricci

Paolo Ricci earned his masters degree in nuclear engineering at the Politecnico di Torino, Turin (Italy) in 2000. His doctoral studies were conducted at the Los Alamos National Laboratory, with focus on kinetic simulation of magnetic reconnection in the Earth's magnetotail. He spent two-and-a-half years as a postdoctoral researcher at Dartmouth College's Department of Physics and Astronomy, where he worked on gyrokinetic simulations of the Z pinch. He joined the EPFL's Swiss Plasma Center (SPC), as a EURATOM fellow in 2006, was named Tenure Track Assistant Professor in June 2010, and Associate Professor in August 2016. He is at the head of the SPC theory group. Paolo Ricci is the recipient of the 2016 Section de Physique Teaching Prize and of the 2021 Craie d'Or award from the EPFL physics bachelor students.