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Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Vesna Bacheva, Aiste Balciunaite, Amir Firouzeh, Edouard Franck Vincent Gustave Leroy, Herbert Shea

The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoconductive switches together with a light projection system to individually address highvoltage actuators. Each actuator is connected to one or more switches that are nominally OFF unless turned ON using direct light illumination. We selected hydrogenated amorphous silicon (a-Si:H) as our photoconductive material, and we provide a complete characterization of its light to dark conductance, breakdown field, and spectral response. The resulting switches are very robust, and we provide full details of their fabrication processes. We demonstrate that the switches can be integrated into different architectures to support both AC and DC-driven actuators and provide engineering guidelines for their functional design. To demonstrate the versatility of our approach, we demonstrate the use of the photoconductive switches in two distinctly different applications-control of mu m-sized gate electrodes for patterning flow fields in a microfluidic chamber and control of cm-sized electrostatic actuators for creating mechanical deformations for haptic displays.

SPRINGERNATURE2023

Fiber pumps for wearable fluidic systems

Vito Cacucciolo, Herbert Shea, Michael James Henry Smith

Incorporating pressurized fluidic circuits into textiles can enable muscular support, thermoregulation, and haptic feedback in a convenient wearable form factor. However, conventional rigid pumps, with their associated noise and vibration, are unsuitable for most wearables. We report fluidic pumps in the form of stretchable fibers. This allows pressure sources to be integrated directly into textiles, enabling untethered wearable fluidics. Our pumps consist of continuous helical electrodes embedded within the walls of thin elastomer tubing and generate pressure silently through charge-injection electrohydrodynamics. Each meter of fiber generates 100 kilopascals of pressure, and flow rates approaching 55 milliliters per minute are possible, which is equivalent to a power density of 15 watts per kilogram. The benefits in design freedom are considerable, which we illustrate with demonstrations of wearable haptics, mechanically active fabrics, and thermoregulatory textiles.

2023