Publications related to Microlithography

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...

Elsevier / William Andrew Publishing2019

Soft Three-dimensional self-opening intraneural peripheral interface for optic nerve stimulation

Diego Ghezzi, Eleonora Borda, Marta Jole Ildelfonsa Airaghi Leccardi

Retinitis Pigmentosa and age-related macular degeneration are two of the principal causes of blindness in industrialized countries, for which there is still no established prevention, treatment or cure. In the past decade, retinal prostheses emerged as pro ...

2018

Three-dimensional microfabrication through a multimode optical fiber

Demetri Psaltis, Christophe Moser, Nicolino Stasio, Donald Benjaman Conkey, Edgar Emilio Morales Delgado, Loïc Urio

3D printing based on additive manufacturing is an advanced manufacturing technique that allows the fabrication of arbitrary macroscopic and microscopic objects. Many 3D printing systems require large optical elements or nozzles in proximity to the built st ...

Optical Soc Amer2017

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...

Elsevier2015

Inkjet Printing Meets Electrochemical Energy Conversion

Hubert Girault, Andreas Stephan Lesch, Fernando Cortes Salazar, Véronique Amstutz, Victor Costa Bassetto

Inkjet printing is a very powerful digital and mask-less microfabrication technique that has attracted the attention of several research groups working on electrochemical energy conversion concepts. In this short review, an overview is given about recent e ...

2015

Analytical Chemistry at the Laboratoire d'Electrochimie Physique et Analytique

Hubert Girault, Natalia Gasilova, Andreas Stephan Lesch, Liang Qiao, Fernando Cortes Salazar, Alexandra Bondarenko

The Laboratoire d'Electrochimie Physique et Analytique (LEPA) has moved to the new Energypolis campus in Sion. This laboratory is involved in energy research in particular by studying charge transfer reactions at soft interfaces and developing interfacial ...

Schweizerische Chemische Gesellschaft2015

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

Herbert Shea, Xavier Maeder, Tobias Bandi

ABSTRACT The mechanical stability of silicon MEMS dies is strongly influenced by the microfabrication processes, especially grinding, dicing and etching, which leave characteristic damage (defects, cracks, dislocations...) in the substrate material. Specia ...

2014

Simulteanous enzyme immobilisation and micro-nanofabrication process for low-cost biosensor applications

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

Biosensors which are based on BioMEMS combine developments in micro-nanotechnology and biological recognition elements, in order to enable the measurement of low level analyte concentrations with portable detection-systems. A major challenge of such small ...

2013

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

A novel one-step microfabrication process of SU-8 films is proposed for developing inexpensive, small size and light-weight optical glucose micro-biosensors. Experimental work was performed in order to investigate whether the widely used in MEMS applicatio ...

2012

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Microlithography

Fabrication of new generation particle detectors

Microstereolithography

Soft Three-dimensional self-opening intraneural peripheral interface for optic nerve stimulation

Three-dimensional microfabrication through a multimode optical fiber

Microstereolithography

Inkjet Printing Meets Electrochemical Energy Conversion

Analytical Chemistry at the Laboratoire d'Electrochimie Physique et Analytique

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

Simulteanous enzyme immobilisation and micro-nanofabrication process for low-cost biosensor applications

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

Graph Chatbot

Chat with Graph Search

Microstereolithography

Fabrication of new generation particle detectors

Simulteanous enzyme immobilisation and micro-nanofabrication process for low-cost biosensor applications

Microstereolithography

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

Soft Three-dimensional self-opening intraneural peripheral interface for optic nerve stimulation

Three-dimensional microfabrication through a multimode optical fiber

Inkjet Printing Meets Electrochemical Energy Conversion

Analytical Chemistry at the Laboratoire d'Electrochimie Physique et Analytique

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation