Publications associées à Microlithography

Bringing casting to microfabrication: processing and deformation of microcastings

This work extends the range of pathways for the production of metallic microcomponents by downscaling metal casting. This is accomplished by using either of two different molding techniques, namely femtosecond laser micromachining or lithographic silicon m ...

EPFL2023

Structured nanoscale metallic glass fibres with extreme aspect ratios

Stéphanie Lacour, Grégoire Courtine, Vasiliki Tileli, Fabien Sorin, Jordan Squair, Giuseppe Schiavone, Nicholas David James, Wei Yan, Yunpeng Qu, Dang Tùng Nguyen

Micro- and nanoscale metallic glasses offer exciting opportunities for both fundamental research and applications in healthcare, micro-engineering, optics and electronics. The scientific and technological challenges associated with the fabrication and util ...

Nature Publishing Group2020

Three-dimensional microfabrication through a multimode optical fiber

Demetri Psaltis, Christophe Moser, Nicolino Stasio, Donald Benjaman Conkey, Edgar Emilio Morales Delgado, Loïc Urio

3D printing based on additive manufacturing is an advanced manufacturing technique that allows the fabrication of arbitrary macroscopic and microscopic objects. Many 3D printing systems require large optical elements or nozzles in proximity to the built st ...

Optical Soc Amer2017

Inkjet Printing Meets Electrochemical Energy Conversion

Hubert Girault, Andreas Stephan Lesch, Fernando Cortes Salazar, Véronique Amstutz, Victor Costa Bassetto

Inkjet printing is a very powerful digital and mask-less microfabrication technique that has attracted the attention of several research groups working on electrochemical energy conversion concepts. In this short review, an overview is given about recent e ...

2015

Carbon nanotubes nanocomposites for microfabrication applications

László Forró, Arnaud Magrez, Sébastien Jiguet, Moshe Judelewicz, Marijana Mionic Ebersold, Thierry Stora

A composite epoxy resin consisting in a SU-8 epoxy resin, a solvent, with or without photoinitiator and carbon nanotubes in powder. When the resin is combined with the carbon nanotubes, the mechanical, thermal and electrical properties of the nanocomposite ...

2011

Biomolecule Patterning on Analytical Devices: A Microfabrication-Compatible Approach

Guillaume Suarez

The present work describes a methodology for patterning biomolecules on silicon-based analytical devices that reconciles 3-D biological functionalization with standard resist lift-off techniques. Unlike classic sol gel approaches in which the biomolecule o ...

2010

Analyse et mise en oeuvre d'un moteur électromagnétique microfabriqué

Sebastiano Merzaghi

Until now, the preferred solution for MEMS (Micro Electro Mechanical Systems) actuation is the electrostatic one. The main reason is that this kind of actuators can be easily manufactured following the microfabrication rules, as their geometry perfectly fi ...

EPFL2010

Conductive SU8 Photoresist for Microfabrication

Philippe Renaud, Heinrich Hofmann, Arnaud Bertsch, Sébastien Jiguet

A conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conducti ...

2005

Microfabrication d'objets composites fonctionnels en 3D et à haut facteur de forme, par procédés UV-LIGA et microstéréolithographie

Sébastien Jiguet

The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. The aim is to build functional 3D objects, with high aspect ratio. Two projects have been investigated in parallel for each micr ...

EPFL2004