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Related publications (71)

Towards a nanostructured thermoelectric generator using ion-track lithography

This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating ...

2008

Integration of MOX gas sensors on polyimide hotplates

Nico de Rooij, Danick Briand, Jérôme Courbat

In this communication, we report on the integration of metal-oxide gas sensors on polymeric micro-hotplates made on polyimide and silicon substrates. Low-power consumption micro-hotplates with platinum electrodes and heaters were fabricated on polyimide me ...

2007

Anode dusting during the electrolytic production of aluminium

Timea Tordai

The disintegration of the carbon anodes during the electrolysis of alumina produces dust particles contaminating the electrolytic bath. This phenomenon, called dusting, is one of the most deleterious Al electrolysis failures, as it leads to a significant d ...

EPFL2007

Formation of Metal Nano- and Micro-patterns on Self-Assembled Monolayers Using Pulsed Laser Deposition through Nanostencils and Electroless Deposition

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Patterns of noble-metal structures on top of self-assembled monolayers (SAMs) on Au and SiO2 substrates have been prepared following two approaches. The first approach consists of pulsed laser deposition (PLD) of Pt, Pd, Au, or Cu through nano- and microst ...

2006

Metal and metaloxide nanostructures on and in plant viruses

Sinan Balci

Tobacco Mosaic Virus (TMV) is composed of 2130 identical coat protein subunits following the right-handed helix of an accompanying RNA strand to produce a 300 nm hollow cylinder with an outer diameter of 18 nm and a 4 nm wide central channel. In this work, ...

EPFL2006

Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers

Peter Ryser, Thomas Maeder, Caroline Jacq, Hansu Birol, Sigfrid Straessler

Ease of fabrication and design flexibility are two attractive features of low temperature co-fired ceramics (LTCC) technology for fabrication of complex micro-fluidic devices. Such structures are designed and processed using different shaping methods, the ...

2005

Fabrication of LTCC Micro-fluidic Devices Using Sacrificial Carbon Layers

Peter Ryser, Thomas Maeder, Caroline Jacq, Hansu Birol, Yannick Sébastien Fournier, Giancarlo Corradini, Reynald Passerini

2005

Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays

Nico de Rooij

In this paper, the design and the characterization of batch fabricated SixNy micropipette arrays with diameters ranging from 6 νm down to 250 nm are described. The process used to fabricate the micromachined pipettes includes a deep reactive ion etching st ...

2005

Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution

Philippe Renaud, Arnaud Bertsch, Stefan Metz

The large majority of microelectromechanical systems (MEMS) are fabricated on silicon, glass or Pyrex substrates by manufacturing techniques, which originated from the semiconductors industry. However, their final application often requires removal of the ...

2005

Electrochemical promotion of ethylene oxidation over Rh catalyst thin films sputtered on YSZ and TiO2/YSZ supports

Christos Comninellis, György Foti

The effect of electrochem. promotion of catalysis or nonfaradaic electrochem. modification of catalytic activity or electropromotion was studied for the model reaction of ethylene oxidn. on sputter-coated Rh films. The thin (40 nm) Rh films were deposited ...

2005

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