Concept

Microtechnology

Related publications (32)

Indoor Navigation of Emergency Agents

Bertrand Merminod, Phillip Tomé, Okan Yalak

Existing indoor navigation solutions usually rely on pre-installed sensor networks, whereas emergency agents are interested in fully auto-deployable systems. In this paper, an almost self-deployable solution based on Radio-frequency identification tags and ...

2007

Micro and nano tools for magnetic field imaging

Schahrazede-Lila Mouaziz

Scanning probe microscopy has become, nowadays, a branch of microscopy widely used to image surfaces of different specimens. Among the various applications, the magnetic imaging is one of the most exciting scanning probe microscopy techniques. It allows th ...

EPFL2007

MICRO-HALL SENSORS ON SU-8 CANTILEVERS FOR MAGNETIC IMAGINIG

Giovanni Boero, Schahrazede-Lila Mouaziz, Chantal Imboden

Micro-Hall sensors made of Bi have been previously fabricated and have shown interesting properties for magnetic field detection. In this project, new ideas to improve the performance of these Hall sensors and to explore ferromagnetic metals are developed. ...

2006

Emerging Nanopatterning Methods based on MEMS Technology

Jürgen Brugger

The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...

2006

Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Nao Takano, Helmut Knapp

Microstencil lithography, i.e. local deposition of micrometer scale patterns through small shadow masks, is a promising method for metal micropattern definition on polymer substrates that cannot be structured using organic-solvent-based photoresist technol ...

2006

Reliability of MEMS for space applications

Herbert Shea

With their extremely low mass and volume, low power consumption and tight integration with electronics, MEMS sensors and actuators are extremely appealing for reducing the size and mass of spacecraft without sacrificing functionality. In view of the harsh ...

2006

Application of Microstencil Lithography on Polymer Surfaces for Microfluidic Systems with Integrated Microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Nao Takano

Microfluidic systems with incorporated microelectrodes are adopted in a variety of applications in life sciences. However, most of micro-electro-fluidic devices are fabricated based on silicon and silicon related materials micromachining processes, which a ...

2006

Small SiN AFM Cantilevers for High Frequency Application

Jürgen Brugger, Johannes Steen

‘Real-time’ nanoscale imaging and single molecule force spectroscopy of bio-chemical specimen based on atomic force microscopy (AFM) requires cantilevers with both low force constant and high-resonant frequency. The required spring constant should be betwe ...

2004

Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation

Nico de Rooij

In this paper, an improved design of a silicon micromachined gyroscope (angular rate sensor) is presented. It is based on the tuning fork principle and realized by combining two proof masses. The gyroscope is driven by electromagnetic forces and detects th ...

1999

Thin film pyroelectric arrays as infra-red detectors

Paul Muralt, Andreas Seifert

Pyroelectric thin film 12-element linear arrays (element size 0.4x0.9 mm(2)) have been fabricated by standard photolithography techniques on silicon substrates. A voltage responsivity of almost 800 V/W in air and 3000 V/W in vacuum is measured at low frequ ...

1997

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