Nico de Rooij, Wilfried Noell
We are developing micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (MOS) requiring cryogenic environment. So far we successfully realized small arrays of 5 x 5 single-crystalline silicon micromirrors. The 100 mu m x 200 mu m ...
SPIE-Intl Soc Optical Engineering, PO Box 10, Bellingham, Wa 98227-0010 Usa2008