Concept

Microelectronics

Related publications (28)

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

Characterization and Modeling of Total Ionizing Dose Effects on Nanoscale MOSFETs for Particle Physics Experiments

Chunmin Zhang

Total ionizing radiation compromises electrical characteristics of microelectronic devices and even causes functional failures of integrated circuits. It has been identified as a potential threat to electronic components, especially those in high-energy ph ...

EPFL2021

Silicon Nitride Integrated Nonlinear Photonics

Junqiu Liu

Recently, microresonator-based dissipative Kerr soliton frequency combs ("soliton microcomb") have emerged as miniaturized optical frequency combs. So far, soliton microcombs have been realized in many CMOS-compatible material platforms including silico ...

EPFL2020

Gallium-Based Thin Films for Wearable Sensors and Electronic Skins

Laurent Mirko Dejace

Integrated wearable electronics capable of providing biophysical information on complex and dynamic systems have attracted high interest in diverse fields such as healthcare, gaming and robotics. Wearable sensors can create artificial, electronic skins wit ...

EPFL2020

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...

Elsevier / William Andrew Publishing2019

Microfluidic sensor and method for obtaining such a sensor

Philippe Renaud, Luc Gaëtan Aeberli, Thomas Michael Braschler, David Vincent Bonzon, Marc Lany, Jonas Choppe, Niklas Van Neyghem

The invention describes a method for producing hybrid microelectronic/microfluidic sensors at industrial scale. The method is characterized in that it comprises the following steps for obtaining said microfluidic channel: a) a first lamination step of a dr ...

2018

Methods and microfabrication techniques for subnanoliter magnetic resonance spectroscopy

Enrica Montinaro

Nuclear magnetic resonance (NMR), electron paramagnetic resonance (EPR) and ferromagnetic resonance (FMR) spectroscopy can open up the possibility of studying many scientifically and biologically relevant samples at the µm and sub-µm scale. Examples of vol ...

EPFL2017

Overview on low temperature co-fired ceramic sensors

Thomas Maeder

Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabricatio ...

Elsevier2015

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...

Elsevier2015

Scintillation detectors based on silicon microfluidic channels

Philippe Renaud, Alessandro Mapelli, Pietro Maoddi

Microfluidic channels obtained by SU-8 photolithography and filled with liquid scintillators were recently demonstrated to be an interesting technology for the implementation of novel particle detectors. The main advantages of this approach are the intrins ...

Institute of Physics2014

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