Publications related to Photolithography

Biomimetic soft lithography on curved nanostructured surfaces

Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Vaida Auzelyte

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

Elsevier2012

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

Jürgen Brugger, Joo Yeon Kim

A shape-tunable approach is demonstrated for the fabrication of multi-scale polymer microlenses ([small mu ]-lenses) and microlens arrays (MLAs) using an ink-jet printing (IJP) technique. Also, the influence of the surface wetting conditions on the geometr ...

Royal Society of Chemistry2012

Fabrication of Bragg Gratings in Microstructured Bi:SiO2 Optical Fiber Using an ArF Laser

Hans Georg Limberger, Georgios Violakis

An ArF excimer laser was used to fabricate Bragg gratings in Bi:SiO2 core - microstructured cladding optical fiber. Average and modulated refractive index changes of 2.7 × 10E-4 and 1.0 × 10E-4 were induced in pristine fiber. Fiber luminescence was also me ...

2012

UV-patternable polymers with selective spectral response

Jürgen Brugger, Victor Javier Cadarso Busto

We present the characterization of dyed doped/modified Epocore resist (Microresist Technology, Germany) with three commercially-available dyes (Proquimac Color, Spain). After being doped with lilac, red and yellow dyes in a 1:2500 ratio (dye:Epocore, w:w), ...

Elsevier2012

Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography

Giovanni De Micheli, Jürgen Brugger, Andreea Veronica Savu, Davide Sacchetto, Michail Zervas, Shenqi Xie, Yusuf Leblebici

We report on the top-down fabrication of vertically-stacked polysilicon nanowire (NW) gate-all-around (GAA) field-effect-transistors (FET) by means of Inductively Coupled Plasma (ICP) etching and nanostencil lithography. The nanostencil is used to form sub ...

Elsevier2012

Fabrication of Bragg gratings in microstructured and step index Bi-SiO2 optical fibers using an ArF laser

Hans Georg Limberger, Georgios Violakis

An ArF excimer laser was used to fabricate Bragg gratings in fibers with Bi-SiO2 core and microstructured or F-doped claddings without fiber presensitization. Average and modulated refractive index changes of 2.7 x 10(-4) and 1.0 x 10(-4) were induced in p ...

Optical Society of America2012

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie

We demonstrate a high-resolution implementation of quasi-dynamic stencil lithography based on the integration of a micro-hotplate on the stencil membrane. The stencil design has been tailored so that the thermally actuated membrane reduces the gap between ...

2012

High-Efficiency Amorphous Silicon Solar Cell on a Periodic Nanocone Back Reflector

Christophe Ballif, Franz-Josef Haug, Corsin Battaglia, Céline Pahud

An amorphous silicon solar cell on a periodic nanocone back reflector with a high 9.7% initial conversion efficiency is presented. The optimized back-reflector morphology provides powerful light trapping and enables excellent electrical cell performance. U ...

2012

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Olivier Martin, Thomas Gerd Siegfried

We report a high-throughput method for the fabrication of metallic nanogap arrays with high-accuracy over large areas. This method, based on shadow evaporation and interference lithography, achieves sub-10 nm gap sizes with a high accuracy of 61.5 nm. Cont ...

American Institute of Physics2011

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Photolithography

Biomimetic soft lithography on curved nanostructured surfaces

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

Fabrication of Bragg Gratings in Microstructured Bi:SiO2 Optical Fiber Using an ArF Laser

UV-patternable polymers with selective spectral response

Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography

Fabrication of Bragg gratings in microstructured and step index Bi-SiO2 optical fibers using an ArF laser

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

High-Efficiency Amorphous Silicon Solar Cell on a Periodic Nanocone Back Reflector

Development of Elastomeric Optofluidic Devices for Lasing and Sensing

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

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Chat with Graph Search

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

Biomimetic soft lithography on curved nanostructured surfaces

Fabrication of Bragg Gratings in Microstructured Bi:SiO2 Optical Fiber Using an ArF Laser

UV-patternable polymers with selective spectral response

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography

High-Efficiency Amorphous Silicon Solar Cell on a Periodic Nanocone Back Reflector

Fabrication of Bragg gratings in microstructured and step index Bi-SiO2 optical fibers using an ArF laser

Development of Elastomeric Optofluidic Devices for Lasing and Sensing

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors