Concept
Photoresist
Related people (39)
Olivier Martin
Olivier J.F. Martin received the M.Sc. and Ph.D. degrees in physics in 1989 and 1994, respectively, from the Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland. In 1989, he joined IBM Zurich Research Laboratory, where he investigated thermal and optical properties of semiconductor laser diodes. Between 1994 and 1997 he was a research staff member at the Swiss Federal Institute of Technology, Zurich (ETHZ). In 1997 he received a Lecturer fellowship from the Swiss National Science Foundation (SNSF). During the period 1996-1999, he spent a year and a half in the U.S.A., as invited scientist at the University of California in San Diego (UCSD). In 2001 he received a Professorship grant from the SNSF and became Professor of Nano-Optics at the ETHZ. In 2003, he was appointed Professor of Nanophotonics and Optical Signal Processing at the Swiss Federal Institute of Technology, Lausanne (EPFL), where he is currently head of the Nanophotonics and Metrology Laboratory and Director of the Microengineering Section.
Hatice Altug
2020-current Full Professor at the Institute of Bioengineering, EPFL, Switzerland2013-2020 Associate Professor (with tenure) at the Institute of Bioengineering, EPFL, Switzerland 2013 Associate Professor (with tenure) at Electrical and Computer Engineering Department of Boston University, USA 2007-2013 Assistant Professor (tenure-track) at Electrical and Computer Engineering Department of Boston University, USA 2007 Post-doctoral Fellow at Center for Engineering in Medicine of Harvard Medical School, USA 2000-2007 PhD. in Applied Physics at Stanford University, USA 1996-2000 B.S. in Physics at Bilkent University, Turkey
Paul Muralt
Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award.
Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/)
Arnaud Magrez
Education
PhD., Materials Science, summa cum laude, Université de Nantes, 2002
M.S., Chemistry, Université des Sciences et Technologies de Lille, 1999
Academic positions
Head of the Crystal Growth Facility, EPFL, 2012-present
Research Associate, Laboratoire de Physique de la Matière Complexe, EPFL, 2003-2012
Research Fellow, Peter Grunberg Institute, FZ-Juelich, 2002-2003
Administrative positions at EPFL
Scientific staff member, EPFL Assembly, 2015-present
Scientific staff member, School Council SB, 2014-present
Member of the IPHYS office 2016-present
Member of the ICMP office 2012-2015
Member of the safety committee of ICMP 2010-2015
Nicolas Grandjean
Nicolas Grandjean received a PhD degree in physics from the University ofNice Sophia Antipolis in 1994 and shortly thereafter joined the French National Center for Scientific Research (CNRS) as a permanent staff member. In 2004, he was appointed tenure-track assistant professor at the École polytechnique fédérale de Lausanne (EPFL) where he created the Laboratory for advanced semiconductors for photonics and electronics. He was promoted to full professor in 2009. He was the director of the Institute of Condensed Matter Physics from 2012 to 2016 and then moved to the University of California at Santa Barbara where he spent 6 months as a visiting professor. Since 2018, he is the head of the School of Physics at the EPFL. He was awarded the Sandoz Family Foundation Grant for Academic Promotion, received the “Nakamura Lecturer” Award in 2010, the "Quantum Devices Award” at the 2017 Compound Semiconductor Week, and “2016 best teacher” award from the EPFL Physics School. His research interests are focused on the physics of nanostructures and III-V nitride semiconductor quantum photonics.