Publications related to Photoresist

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi

We present a vertically movable silicon photonic MEMS switch realized in IMEC's standard silicon photonics platform followed by a dedicated postprocessing for MEMS release. The device has six optical ports, which enable four switching configurations with a ...

IEEE2021

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Herbert Shea, Samuel Rosset, Giulio Grasso

Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric

Danick Briand, Jaemin Kim, Alessio Mancinelli

Solution processing is an attractive alternative to standard vacuum fabrication techniques for the large-area manufacturing of metal oxide (MOx)-based electron devices. Here, we report on thin-film transistors (TFTs) based on a solution-processed indium zi ...

AMER CHEMICAL SOC2020

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Yu Zhang

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platform ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020

Compact broadband suspended silicon photonic directional coupler

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Yu Zhang

Directional couplers are extensively used in photonic integrated circuits as basic components for efficient on-chip photonic signal routing. Conventionally, directional couplers are fully encapsulated in the technology's waveguide cladding material. In thi ...

OPTICAL SOC AMER2020

Photoinitiator-free multi-photon fabrication of compact optical waveguides in polydimethylsiloxane

Demetri Psaltis, Christophe Moser, Giulia Panusa, Ye Pu, Jieping Wang

Compact, low loss flexible optical waveguides are crucial in optofluidic and microfluidic devices for a dense integration of optical functionalities. We demonstrate the fabrication of compact optical waveguides in polydimethylsiloxane through multiphoton l ...

OPTICAL SOC AMER2019

Health monitoring device

Christian Enz, Assim Boukhayma, Antonino Caizzone

The invention relates to a photoplethysmography (PPG) sensing device comprising - a pulsed light source, - at least one pixel to create photo-generated electrons, synchronized with said pulsed light source. It is mainly characterized in that each pixel com ...

2019

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Niels Quack, Pascal Gallo, Teodoro Graziosi

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adh ...

2019

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Photoresist

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Increased electromechanical sensitivity of polysiloxane elastomers by chemical modification with thioacetic groups

Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Compact broadband suspended silicon photonic directional coupler

Photoinitiator-free multi-photon fabrication of compact optical waveguides in polydimethylsiloxane

Health monitoring device

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Graph Chatbot

Chat with Graph Search

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Low-Voltage Silicon Photonic Mems Switch With Vertical Actuation

Increased electromechanical sensitivity of polysiloxane elastomers by chemical modification with thioacetic groups

Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric

Photoinitiator-free multi-photon fabrication of compact optical waveguides in polydimethylsiloxane

Health monitoring device

Compact broadband suspended silicon photonic directional coupler

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production