Concept

Event (particle physics)

Related publications (32)

Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials

We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of ...

2001

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

Christoph Hollenstein, Alan Howling

In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures. The silane gas constumption was observed by infrared abso ...

1998

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