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Electromagnetic wave propagation effects can give rise to important limitations for processing uniformity in large area, radio-frequency (rf) capacitive plasma reactors. The electromagnetic wavefield solution is derived for a capacitive, high-frequency, cy ...
Feasibility Study of Shaped Electrode The objective of this project was a feasibility study of a novel, large-area plasma reactor for thin film production, based on a shaped electrode technique ("lens") to compensate the standing wave non-uniformity. Cyli ...
Nuclear materials have been successfully employed in commercial fission reactors for many decades. Research and material development for advanced fission system and future thermo-nuclear fusion reactors have acquired maturity while great challenges remain ...
The electromagnetic standing wave becomes one of the main sources of plasma nonuniformity in large area capacitively coupled rf reactors. In cylindrical reactors with a central rf connection or one-dimensional linear reactors with rf connections at both ex ...
