Publications related to Microfabrication

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

Jürgen Brugger, Shenqi Xie, Valentin Flauraud

To grow small molecule semiconductor thin films with domain size larger than modern-day device sizes, we evaporate the material through a dense array of small apertures, called a stencil nanosieve. The aperture size of 0.5 μm results in low nucleation dens ...

Amer Chemical Soc2017

DOD Inkjet printing of functional polymers

Jürgen Brugger, Thomas Maeder, Mohammadmahdi Kiaee

Inkjet printing techniques have gained a lot of attention for the micro-structuring of functional materials. This is due to their low cost, low material consumption and relatively easy fabrication process. In this project, Drop-on-Demand (DOD) inkjet print ...

2017

Small-scale metal castings, small-scale metal/transparent composite structures and process to produce same

Andreas Mortensen, Yves Bellouard, Raphaël Charvet, Cyril Dénéréaz

The method comprises at least the following steps: - exposing a substrate to focused laser irradiation at a preselected series of locations that trace a subset of the substrate volume that is connected to the surface of the substrate; some subsets of subst ...

2017

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Annalisa De Pastina, Pierre-Emmanuel Marie Thiriet

This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O ...

2016

Droplet extraction module for the analysis of segmented flow generated by a neural probe

Philippe Renaud, Arnaud Bertsch, Guillaume Cédric Yves Petitpierre, Colin Darbellay

We recently developed a neural probe allowing to capture at high temporal resolution nano-volume droplets of interstitial fluid from the brain organized in a segmented flow. In order to enable the analysis of these small volume and low concentration drople ...

2016

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016

A Novel 4-DOF Origami Grasper With an SMA-Actuation System for Minimally Invasive Surgery

Marco Salerno

Minimally invasive surgery (MIS) is one of the most challenging techniques for robot designers due to the limited size of access points, the high miniaturization level, and the dexterity needed for performing surgical tasks. Conversely, only a few microfab ...

Ieee-Inst Electrical Electronics Engineers Inc2016

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Antoine Nicolas Désiré Aupée

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in m ...

2016

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Microfabrication

Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

High Throughput Characterization of Epitaxially Grown Single-Layer MoS2

DOD Inkjet printing of functional polymers

Small-scale metal castings, small-scale metal/transparent composite structures and process to produce same

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Droplet extraction module for the analysis of segmented flow generated by a neural probe

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

A Novel 4-DOF Origami Grasper With an SMA-Actuation System for Minimally Invasive Surgery

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Graph Chatbot

Chat with Graph Search

Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes

A Novel 4-DOF Origami Grasper With an SMA-Actuation System for Minimally Invasive Surgery

Droplet extraction module for the analysis of segmented flow generated by a neural probe

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

High Throughput Characterization of Epitaxially Grown Single-Layer MoS2

Small-scale metal castings, small-scale metal/transparent composite structures and process to produce same

DOD Inkjet printing of functional polymers

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications