Publication
We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.
Rosario Scopelliti, Marinella Mazzanti, Fang-Che Hsueh, Luciano Barluzzi
Nicola Marzari, Antonio Abate, Ngoc Linh Nguyen
Tobias Kippenberg, Junqiu Liu, Wenle Weng