Concept
Plasma etching
Related publications (442)
Characterization of low-temperature plasmas generated by dielectric barrier discharges for bacterial inactivation
Low-temperature plasmas (LTPs) at atmospheric pressure hold great promise for disinfection and sterilization applications. When compared to traditional sterilization technologies like autoclaving, LTPs may offer several benefits, including reduced energy c ...
EPFL2024Hosing of a Long Relativistic Particle Bunch in Plasma
Ambrogio Fasoli, Ivo Furno, Patrick Blanchard, Yanis Andrebe, Riccardo Agnello, Christine Stollberg, Sun Hee Kim, Alban Sublet, Shuai Liu
Experimental results show that hosing of a long particle bunch in plasma can be induced by wakefields driven by a short, misaligned preceding bunch. Hosing develops in the plane of misalignment, selfmodulation in the perpendicular plane, at frequencies clo ...
Amer Physical Soc2024Bodily implant microelectrode and bodily implant microelectrode fabrication method
Sandro Carrara, Diego Ghezzi, Gian Luca Barbruni
The present invention concerns a bodily implantable or probe device and microelectrode fabrication method comprising providing at least one silicon substrate including an electronic device or unit; providing, on a first side of the silicon substrate, at le ...
2024Etching selectivity and passivity of Al2O3 layers
The project focuses on etching properties of the atomic layer deposition (ALD) of Al2O3. For this purpose, etching processes such as plasma etch with sulfur hexafluoride (SF6), gas etch with xenon difluoride (XeF2), wet etch with MIF developer (726 MIF) as ...
2023Micromachining of Hafnium Carbide
During this project, the microfabrication of Hafnium Carbide (HfC) was investigated. Multiple tools were considered and tested for their compatibility and effectiveness when working with HfC. The main method of choice for the machining of HfC thin films wa ...
2023The role of plasma-atom and molecule interactions on power & particle balance during detachment on the MAST Upgrade Super-X divertor
Christian Gabriel Theiler, Kevin Henricus Annemarie Verhaegh
This paper shows first quantitative analysis of the detachment processes in the MAST Upgrade Super-X divertor (SXD). We identify an unprecedented impact of plasma-molecular interactions involving molecular ions (likely D2+ ), resulting in strong ion sinks ...
Bristol2023Plasma sputtering of biased electrodes in an oblique magnetic field
Stefano Alberti, Ivo Furno, Alessandro Geraldini
The surface erosion of biased electrodes immersed in a radio frequency (RF) plasma was investigated in oblique magnetic fields ranging from 0.1 T to 3.5 T. The plasma potential and density in the vicinity of the biased electrode have been measured using an ...
IOP Publishing Ltd2023Integrated modelling of neon impact on JET H-mode core plasmas
Nuclear fusion reactor plasmas will need to exhaust a significant proportion of energy flux through radiative processes, to enable acceptable divertor loads. This can be obtained by line radiation from impurities, injected from the plasma edge. There are h ...
IOP Publishing Ltd2023