Concept
Fabless manufacturing
Related publications (32)
Metasurface-stabilized optical microcavities
Cavities concentrate light and enhance its interaction with matter. Confining to microscopic volumes is necessary for many applications but space constraints in such cavities limit the design freedom. Here we demonstrate stable optical microcavities by cou ...
NATURE PORTFOLIO2023Printed degradable piezoelectric microsystems: From ink formulation to device fabrication and characterization
As the world moves further and further into the semiconductor era, the amount of waste generated from electronics ("e-waste") is increasing rapidly and unsustainably. Of particular note, alternatives to lead-based piezoelectric materials must be establishe ...
EPFL2023Piezoelectric suspended microchannel resonators
The objective of this PhD thesis is the development of a microfluidic platform for the real-time measurements of the mechanical properties of biological analytes at the single entity level.The systems developed for these purposes consist of piezoelectrical ...
EPFL2022Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
Luis Guillermo Villanueva Torrijo, Sayedeh Shirin Afyouni Akbari, Stefan Wagner
Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...
2020