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Conical surface

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Conical surface

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A Virtual Keyboard Based on True-3D Optical Ranging

Emerging nanopatterning methods based on MEMS tools

Advancing towards well-controlled full-wafer nanostencil lithography

Characterisation and applications of stencil lithography

Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

Fabrication and characterization of metal nanolevers made by shadow mask technology

Resistless Fabrication and Characterisation of Metal Nanolevers Arrays

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

Full-wafer stencils fabricated by a DUV/MEMS process for high-throughput patterning of mesoscopic structures

DUV/MEMS based stencils for full-wafer scale, resistless, patterning of mesoscopic structures