Concept

Scanning probe lithography

Related publications (109)

Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

In this work, we demonstrate a nanofabrication technique based on thermal scanning probe lithography (t-SPL), PDMS molding, and bottom-up capillary-assisted particle assembly (CAPA). The repeatability of the pattern transfer from the thermal sensitive poly ...

2017

Nanoparticle Manipulation with an AFM Probe

Scanning probe lithography (SPL) includes a variety of techniques which produce nanopatterns based on the interaction between an AFM probe and a substrate, Figure 1 shows an overview of possible techniques of scanning probe lithography. Here we focus on th ...

2017

Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography

Jürgen Brugger, Samuel Zimmermann

The miniaturization of nanometer-sized multicolor fluorescent features is of continuous significance for counterfeit security features, data storage, and sensors. Recent advances in engineering of stimuli-responsive supramolecular polymeric materials that ...

2017

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Jürgen Brugger, Yuliya Lisunova

Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the su ...

Nature Publishing Group2017

Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

Jürgen Brugger, Xiao Sheng Zhang, Ya Wang, Samuel Zimmermann

We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for the ...

2017

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Jürgen Brugger, Yuliya Lisunova

Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication ...

Elsevier2017

Preceramic Polymers as Precursor for implantable MEMS Applications

Lorenz Hagelüken

Polymer-derived ceramics (PDCs) offer a variety of unique features that outperform classical powder-sintered ceramics and make PDCs valuable candidates for challenging applications such as implantable MEMS. The precise controllability of the precursors’ ch ...

2017

Top-Down Technique for Scaling toNnano in Silicon MEMS

Yusuf Leblebici, Zuhal Tasdemir, Mustafa Yilmaz, Yasin Kilinc

Nanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example high ...

American Vacuum Society2017

Potential energy-driven spin manipulation via a controllable hydrogen ligand

Klaus Kern, Markus Ternes

Spin-bearing molecules can be stabilized on surfaces and in junctions with desirable properties, such as a net spin that can be adjusted by external stimuli. Using scanning probes, initial and final spin states can be deduced from topographic or spectrosco ...

Amer Assoc Advancement Science2017

Thermal scanning probe lithography on a glassy supramolecular film creates a combination of topogrpahy and fluroescent nanostructures

Jürgen Brugger, Samuel Zimmermann

Here, we report the nanoscale thermal modification of a new type of fluorescent stimuli-responsive supramolecular polymer assembled from a building block (OPV(UPy)2-RG), which features an excimer-forming fluorescent oligo(phenylene vinylene) (OPV) chromoph ...

2016

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