Publications related to Scanning probe lithography

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

Nanoporous SiN membranes are interesting for a number of applications, e.g. stenciling, filtration, or tissue engineering [1-3]. The patterning of the pores requires a high resolution lithographic tool. Focused ion beam milling or e-beam lithography fulfil ...

2010

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Jürgen Brugger, Andreea Veronica Savu

We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...

2010

Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

Jürgen Brugger, Cristina Martin Olmos

Nanocomposites based on an organic polymer and inorganic nanocrystals (NCs) represent a class of high impact functional materials able to convey the unique size and shape dependent properties of nano-objects to highly processable resists.[1] In this work, ...

Procedia Chemistry2010

Electron-beam induced photoresist shrinkage influence on 2D profiles

Vasiliki Tileli

For many years, lithographic resolution has been the main obstacle in keeping the pace of transistor densification to meet Moore's Law. For the 32 nm node and beyond, new lithography techniques will be used, including immersion ArF (iArF) lithography and e ...

International Society for Optics and Photonics2010

MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

Jürgen Brugger, Cristina Martin Olmos

2010

Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy

Nico de Rooij, Terunobu Akiyama

The quartz tuning fork based probe {e.g., Akiyama et al. [Appl. Surf. Sci. 210, 18 (2003)]}, termed "A-Probe," is a self-sensing and self-actuating (exciting) probe for dynamic mode atomic force microscope (AFM) operation. It is an oscillatory force sensor ...

American Institute of Physics2010

Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy

Nico de Rooij, Terunobu Akiyama, Kaspar Suter

In this paper, we report on the integration technique and fabrication of a scanning probe interrogating the location of charges and their tracks inside quantum devices. Our unique approach is to pattern the charged sensor into a high topography micromechan ...

2010

Position controlled self-catalyzed growth of GaAs nanowires by molecular beam epitaxy

Anna Fontcuberta i Morral

GaAs nanowires are grown by molecular beam epitaxy using a self-catalyzed, Ga-assisted growth technique. Position control is achieved by nano-patterning a SiO2 layer with arrays of holes with a hole diameter of 85 nm and a hole pitch varying between 200 nm ...

Institute of Physics2010

Surface Nanopatterning by Polymer Self-Assembly: from Applied Research to Industrial Applications

Nicolas Blondiaux, Jeffrey Alan Hubbell, Raphaël Pugin, Martha Liley, Ana Maria Popa

Complementary methods have been developed for surface nanostructuring using molecular self-assembly, reactive ion etching and replication techniques. First, controlled surface nanostructures with tunable lateral dimensions from tens of nanometer to tens of ...

2009

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Scanning probe lithography

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

Electron-beam induced photoresist shrinkage influence on 2D profiles

MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy

Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy

Position controlled self-catalyzed growth of GaAs nanowires by molecular beam epitaxy

Surface Nanopatterning by Polymer Self-Assembly: from Applied Research to Industrial Applications

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

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Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

Electron-beam induced photoresist shrinkage influence on 2D profiles

Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy

Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy

Position controlled self-catalyzed growth of GaAs nanowires by molecular beam epitaxy

Surface Nanopatterning by Polymer Self-Assembly: from Applied Research to Industrial Applications

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application