Concept

Etching (microfabrication)

Related publications (401)

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Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Jürgen Brugger, Yuliya Lisunova

Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the su ...

Nature Publishing Group2017

Fabrication of 2d Material Based Resonators

Tom Larsen, An Tran

Improvements in manufacturing processes inspired by the semiconductor integrated circuit industry have seen a sharp reduction in dimensions of microelectromechanical systems (MEMS), leading to the emergence of its submicron counterpart – nanoelectromechani ...

2017

Microfluidic and Electrokinetic Manipulation of Single Cells

Samuel Kilchenmann

Traditional cell assays report on the average results of a cell population. However, a wide range of new tools are being developed for a fundamental understanding of single cell's functionality. Nonetheless, the current tools are either limited in their th ...

EPFL2017

3D multi-layer probe for application in neuroprosthetics

Diego Ghezzi, Marta Jole Ildelfonsa Airaghi Leccardi, Vivien Gaillet, Bastien Duckert

In neuroprosthetics, prostheses with higher and denser electrodes are needed to obtain both more precise recordings and targeted stimulations. The main limit is the routing of the active sites to the electronic control unit. A solution is to place electrod ...

2017

Methods and microfabrication techniques for subnanoliter magnetic resonance spectroscopy

Enrica Montinaro

Nuclear magnetic resonance (NMR), electron paramagnetic resonance (EPR) and ferromagnetic resonance (FMR) spectroscopy can open up the possibility of studying many scientifically and biologically relevant samples at the µm and sub-µm scale. Examples of vol ...

EPFL2017

Diamond microelectrode arrays for in vitro neuronal recordings

Michele Giugliano

A novel microfabrication technique for microelectrode arrays (MEAs) with a full diamond-cell interface is demonstrated. Boron-doped nano-crystalline diamond (BNCD) is used as a conductive electrode material on metal tracks insulated by intrinsic NCD. MEAs ...

Cambridge Univ Press2017

Programmable chiral nanocolloids

Hyeonho Jeong

Nanoparticles promise a variety of application in energy, medicine, and biology. However, most nanoparticlesâ material composition and shape cannot be tuned and so functions have thus far been limited. Moreover they are often also chemically unstable in ...

EPFL2017

In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement

Jürgen Brugger, Duncan Thomas Lindsay Alexander, Pamina Winkler, Valentin Flauraud, Raju Regmi

Optical nanoantennas have a great potential for enhancing light-matter interactions at the nanometer scale, yet fabrication accuracy and lack of scalability currently limit ultimate antenna performance and applications. In most designs, the region of maxim ...

American Chemical Society2017

Nearly perfect GaN crystal via pit-assisted growth by HVPE

Dmitry Mikulik

We demonstrated 5 mm-thick bulk gallium nitride (GaN) with nearly perfect crystal quality. To achieve this, intentional etch pit formation by in situ dry HCl etching and ex situ wet etching in H3PO4 solution was employed on freestanding GaN templates follo ...

Royal Soc Chemistry2017

Array imaging system for lithography

Toralf Scharf, Wilfried Noell, Raoul Kirner

We present an integrated array imaging system based on a stack of microlens arrays. The microlens arrays are manufactured by melting resist and reactive ion etching (RIE) technology on 8'' wafers (fused silica) and mounted by wafer-level packaging (WLP)(1) ...

Spie-Int Soc Optical Engineering2016