Concept

Sputter deposition

Related publications (588)

About
Privacy
Disclaimer

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Sputter deposition

Graph Chatbot

Chat with Graph Search

Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique

Advancing towards well-controlled full-wafer nanostencil lithography

Physico-chemical study of the focused electron beam induced deposition process

IN-SITU STABILIZATION OF MEMBRANES FOR IMPROVED LARGE-AREA AND HIGH-DENSITY NANOSTENCIL LITHOGRAPHY

Density functional theory study of adsorption and dissociation of HfCl4 and H2O on Ge∕Si(100)-(2×1): Initial stage of atomic layer deposition of HfO2 on SiGe surface

Modeling the influence of intermittent rain events on long-term fate and transport of organic air pollutants

Outer divertor target deposited layers during reversed magnetic field operation in JET

Initial surface reactions in atomic layer deposition of Al2O3 on the hydroxylated GaAs(001)-4 x 2 surface

Pulsed Laser Deposition of Metals on Self-Assembled Monolayers

Microstructural and electrical properties of (Sr,Ba)Nb2O6 thin films grown by pulsed laser deposition