MICRO-534: Advanced MEMS & microsystems

Summary

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

Official source

https://edu.epfl.ch/coursebook/en/advanced-mems-microsystems-MICRO-534

Moodle Page

http://go.epfl.ch/MICRO-534

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Lectures in this course (26)

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