Course

MICRO-470: Scaling laws & simulations in micro & nanosystems

Summary

This class combines an analytical and finite elements modeling (FEM) simulations approach to scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

About this result
This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.