Lecture

Micro-Electro-Mechanical Systems

Description

This lecture introduces Micro-Electro-Mechanical Systems (MEMS), which integrate mechanical elements, sensors, actuators, and sometimes electronics on a common substrate through microfabrication technology. It covers the general operating principles, MEMS elements like actuators and sensors, scaling laws, the choice of silicon for MEMS, sensors for various measurements, and actuators for different applications.

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