Lecture
This lecture covers various methods of transduction for detecting motion and deformation, including optical lever detection, optical interferometer detection, capacitive detection, piezoelectric detection, and piezoresistive detection. It explains the principles behind each method and their advantages and limitations, such as resolution, accuracy, integration feasibility, and alignment issues. The instructor discusses the use of different transduction techniques in microscale applications, emphasizing the association with forces and deformations. The lecture also explores the electromechanical efficiency and performance requirements for MEMS transduction, highlighting the trade-offs involved in selecting the most suitable method for specific applications.