Electrostatic MEMS: DEA and Comb Drives

This lecture covers the design and operation of electrostatic MEMS devices, focusing on Dielectric Elastomer Actuators (DEA) and Comb Drives. The slides discuss the principles behind DEA, including energy density and maximum strain, as well as the combination of DEA with Electro-Adhesion for high holding force. Additionally, the lecture explores the concept of Electrostatic Zipping actuators to reduce voltage while maintaining displacement. The use of Comb Drives is explained in detail, highlighting their advantages over parallel plate MEMS, such as linear sensitivity and large displacement capabilities. Examples of MEMS applications, such as tunable gratings and MEMS gyroscopes, are also presented.