Lecture

Basic Industrial Plasmas

Description

This lecture covers the general introduction to basic industrial plasmas and plasma chemistry, explaining how high-temperature plasma chemistry can be applied to low-temperature substrates. It also describes the formation of a plasma, its applications in satellite design, the physics of the plasma sheath, and its use in plasma etching and macro-electronic manufacturing, with a focus on micro-electronics.

In MOOCs (5)

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_8giik501

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